Interlayer dielectrics for semiconductor technologies /
Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challe...
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| Other Authors: | , , |
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Amsterdam ; Boston :
Elsevier/Academic Press,
2003.
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| Subjects: | |
| Online Access: | CONNECT |
