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|a C 13.46:598
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|a Online Government Document
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1 |
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|a Bullis, W. Murray.
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1 |
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|a Methods of measurement for semiconductor materials, process control, and devices :
|b quarterly report January 1 to March 31, 1971 /
|c W. Murray Bullis.
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| 264 |
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1 |
|a Gaithersburg, MD :
|b U.S. Dept. of Commerce, National Institute of Standards and Technology,
|c 1971.
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|a NBS technical note ;
|v 598
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| 500 |
|
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|a 1971.
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| 500 |
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|a Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
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| 500 |
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|a Title from PDF title page.
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|a Includes bibliographical references.
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| 700 |
1 |
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|a Bullis, W. Murray.
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| 710 |
1 |
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|a United States.
|b National Bureau of Standards.
|
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|a NBS technical note ;
|v 598.
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