Methods of measurement for semiconductor materials, process control, and devices. /

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Bibliographic Details
Main Author: Bullis, W. Murray
Corporate Author: United States. National Bureau of Standards
Format: Government Document Electronic eBook
Language:English
Published: Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 1968.
Series:NBS technical note ; 472.
Online Access:CONNECT

MARC

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