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|a 621.39/5
|2 23
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| 100 |
1 |
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|a Zhang, Jie,
|d 1963 September 21-
|e author.
|
| 245 |
1 |
0 |
|a Wafer fabrication :
|b automated material handling systems /
|c Jie Zhang, Wei Qin, Lihui Wu, Junliang Wang, Youlong Lv, Xiaoxi Wang.
|
| 264 |
|
1 |
|a Berlin ;
|a Boston :
|b Walter de Gruyter GmbH,
|c [2018]
|
| 300 |
|
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|a 1 online resource (xi, 272 pages)
|
| 336 |
|
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|a text
|b txt
|2 rdacontent
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|a Includes bibliographical references and index.
|
| 505 |
0 |
0 |
|t Frontmatter --
|t Preface --
|t Contents --
|t 1 Semiconductor wafer fabrication system --
|t 2 Automated material handling systems in SWFSs --
|t 3 Modeling methods of automated material handling systems in SWFSs --
|t 4 Analysis of automated material handling systems in SWFSs --
|t 5 Scheduling methods of automated material handling systems in SWFSs --
|t 6 Scheduling in Interbay automated material handling systems --
|t 7 Scheduling in Intrabay automatic material handling systems --
|t 8 Integrated scheduling in AMHSs --
|t 9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs --
|t Index
|
| 546 |
|
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|a In English.
|
| 588 |
0 |
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|a Online resource; title from digital title page (viewed on December 11, 2018).
|
| 500 |
|
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|a EBSCO eBook Academic Comprehensive Collection North America
|
| 650 |
|
0 |
|a Semiconductor wafers
|x Automatic control.
|
| 650 |
|
0 |
|a Manufacturing processes
|x Automatic control.
|
| 730 |
0 |
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|a WORLDSHARE SUB RECORDS
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| 776 |
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|i Print version:
|a Zhang, Jie, 1963 September 21-
|t Wafer fabrication.
|d Berlin ; Boston : De Gruyter, [2018]
|z 9783110486902
|w (DLC) 2018007853
|w (OCoLC)1024215291
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|a Middle Tennessee State University
|b Main
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|h Library of Congress classification
|
