Dielectric films for advanced microelectronics /
The topic of thin films is an area of increasing℗¡importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices.
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| Other Authors: | , , |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Chichester, England ; Hoboken, NJ :
John Wiley & Sons,
©2007.
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| Subjects: | |
| Online Access: | CONNECT |
