Dielectric films for advanced microelectronics /
The topic of thin films is an area of increasing℗¡importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices.
Saved in:
| Other Authors: | , , |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Chichester, England ; Hoboken, NJ :
John Wiley & Sons,
©2007.
|
| Subjects: | |
| Online Access: | CONNECT |
| Summary: | The topic of thin films is an area of increasing℗¡importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. |
|---|---|
| Item Description: | Wiley EBA |
| Physical Description: | 1 online resource (xxii, 486 pages) : illustrations |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9780470017944 0470017945 9780470065419 0470065419 1282346202 9781282346208 9786612346200 6612346205 |
