Crystal growth and evaluation of silicon for VLSI and ULSI /

Crystal growth and evaluation of silicon for VLSI and ULSI /

Silicon, as a single-crystal semiconductor, has sparked a revolution in the field of electronics and touched nearly every field of science and technology. Though available abundantly as silica and in various other forms in nature, silicon is difficult to separate from its chemical compounds because...

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Bibliographic Details
Main Author: Eranna, G. (Author)
Format: Electronic eBook
Language:English
Published: Boca Raton : CRC Press, [2015]
Subjects:
Silicon crystals.
Silicon crystals > Electric properties.
Crystal growth.
Integrated circuits > Very large scale integration.
Integrated circuits > Ultra large scale integration.
Online Access:CONNECT
Table of Contents:
  • 1. Introduction
  • 2. Silicon : the key material for integrated circuit fabrication technology
  • 3. Importance of single crystals for integrated circuit fabrication
  • 4. Different techniques for growing single-crystal silicon
  • 5. From silicon ingots to silicon wafers
  • 6. Evaluation of silicon wafers
  • 7. Resistivity and impurity concentration mapping of silicon wafers
  • 8. Impurities in silicon wafers
  • 9. Defects in silicon wafers
  • 10. Silicon wafer preparation for VLSI and ULSI processing
  • 11. Packing of silicon wafers.

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