Crystal growth and evaluation of silicon for VLSI and ULSI /
Silicon, as a single-crystal semiconductor, has sparked a revolution in the field of electronics and touched nearly every field of science and technology. Though available abundantly as silica and in various other forms in nature, silicon is difficult to separate from its chemical compounds because...
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| Main Author: | |
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Boca Raton :
CRC Press,
[2015]
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| Subjects: | |
| Online Access: | CONNECT |
